Rapid thermal processing of semiconductors
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Author
Contributions
- Hesketh, P. J. - Contributor
Publication
1997 - Plenum Press, New York, New York (State)
Language
English
Word Count
89,500 words, Guess
Page Count
358 pages
Identifiers
- Open LibraryOL658573M
- ISBN-100306450542
- OCLC Control Number36327442
- OCLC Control Numberrapidthermalproc0000bori
- Library of Congress Control Number97003783
and 1 more
- Goodreads3950544
Classifications
- DDC621.3815/2
- LCCTK7871.85 .B64 1997
Subjects
Series Statement
- Microdevices
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