Photodeposition of nitride insulators on III-V substrates
annual report
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Author
Contributions
- Research Institute of Colorado. - Contributor
- United States. National Aeronautics and Space Administration. - Contributor
Publication
1984 - Research Institiute of Colorado, Fort Collins, Colo, Colorado
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Physical Format
Microform
Identifiers
- Open LibraryOL16154666M
Subjects
Topics
NitridesThin filmsVapor depositionLong term effectsStorage stabilityLaser applicationsSilicon-on-insulator technology
Series Statement
- NASA CR -- 173393.
- NASA contractor report -- NASA CR-173393.
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