Characterization of plasma-enhanced CVD processes
symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
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Contributions
- Lucovsky, G. - Contributor
- Ibbotson, Dale E. - Contributor
- Hess, Dennis W. - Contributor
Publication
1990 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
62,500 words, Guess
Page Count
250 pages
Identifiers
- Open LibraryOL1854752M
- ISBN-101558990534
- OCLC Control Number21974391
- Library of Congress Control Number90006543
- Goodreads2421493
Classifications
- DDC621.381/52
- LCCTS695.15 .C47 1990
Subjects
Topics
Series Statement
- Materials Research Society symposium proceedings ;
Other Editions
- Characterization of plasma-enhanced CVD processes: symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
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