Handbook of multilevel metallization for integrated circuits
materials, technology, and applications
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Author
Contributions
- Wilson, Syd R. - Contributor
- Tracy, Clarence J. - Contributor
- Freeman, John L. - Contributor
Publication
1993 - Noyes, Park Ridge, N.J., U.S.A, New Jersey
Language
English
Word Count
221,750 words, Guess
Page Count
887 pages
Identifiers
- Open LibraryOL1417085M
- ISBN-100815513402
- OCLC Control Number50306867
- OCLC Control Number28422959
- Library of Congress Control Number93026689
and 2 more
- LibraryThing4014923
- Goodreads4216736
Classifications
- DDC621.3815
- LCCTK7874 .H3493 1993
Description
It is widely recognized that the successful design, development, and integration of multilevel metallization (MLM) systems is and will continue to be key to current and future VLSI technologies. All major semiconductor companies have significant ongoing research teams focused in this area. These teams must view multilevel metallization as a system rather than a collection of isolated process modules. MLM teams are usually composed of unit process specialists and it is difficult for them to become generalists to solve the device, design, chemical, materials science, and analysis problems which are encountered. The engineers comprising these teams have been forced to accumulate and read large numbers of publications from each topical area to obtain a reasonably complete understanding of the numerous topics . The Handbook of Multilevel Metallization for Integrated Circuits answers this need by pulling together in one volume a thorough technical summary of each of the key areas that make up a multilevel metal system. Properly included are associated design, analysis, materials, and manufacturing topics. The book serves three purposes: (1) It is a good learning tool for the engineer newly assigned to work in metallization. All important aspects of the fully integrated process are discussed in sufficient depth such that no additional literature searches are needed. (2) It serves as a reference text for any MLM engineer, new or experienced, who needs a refresher about the specifics of a concept or process. (3) For someone who wants to further specialize in one topical area, an extensive listing of references has been provided to simplify more in-depth study.
Subjects
Series Statement
- Materials science and process technology series
Other Editions
- Handbook of multilevel metallization for integrated circuits: materials, technology, and applications
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