Contributions

  • IEEE Electron Devices Society. - Contributor
  • Semiconductor Equipment and Materials International. - Contributor

Publication

2001 - IEEE, Piscataway, New Jersey, New Jersey

Language

English

Word Count

61,000 words, Guess

Page Count

244 pages

Identifiers

  • ISBN-100780365550
  • ISBN-100780365569
  • ISBN-139780780365551
  • ISBN-139780780365568
  • OCLC Control Number48083177
and 1 more

Alternate Titles

  • 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.
  • Advancing the science of semiconductor manufacturing excellence.
  • Advanced Semiconductor Manufacturing Conference and Workshop.
  • Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.

Subjects

Genres

  • Congresses

Links

Other Editions

  • ASMC 2001: the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].IEEE2001-01-01

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