Characterization and metrology for ULSI technology, 2000
international conference, Gaithersburg, Maryland, 26-29 June 2000
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Author
Contributions
- Seiler, David G. - Contributor
- International Conference on Characterization and Metrology for ULSI Technology (2000 : Gaithersburg, Md.) - Contributor
Publication
2001 - American Institute of Physics, Melville, NY, New York (State)
Language
English
Word Count
177,000 words, Guess
Page Count
708 pages
Identifiers
- ISBN-10156396967X
- ISBN-101563969793
- ISBN-139781563969676
- ISBN-139781563969799
- Goodreads1059138
and 3 more
- Library of Congress Control Number00111547
- OCLC Control Number46652318
- Open LibraryOL19020284M
Subjects
Topics
Genres
- Congresses
- Software
Series Statement
- AIP conference proceedings -- 550
- AIP conference proceedings -- no. 550.
Other Editions
- Characterization and metrology for ULSI technology, 2000
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