VLSI metallization
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Contributions
- Einspruch, Norman G. - Contributor
- Cohen, Simon S. - Contributor
- Gildenblat, Gennady Sh. - Contributor
Publication
1987 - Academic Press, Orlando, Florida
Language
English
Word Count
120,000 words, Guess
Page Count
480 pages
Identifiers
- Open LibraryOL2734432M
- ISBN-100122341155
- OCLC Control Number79191052
- OCLC Control Numbervlsielectronicsm00eins_534
- Library of Congress Control Number86028744
and 1 more
- Goodreads528737
Classifications
- DDC621.381/73 s
- LCCTK7874 .V56 vol. 15
Subjects
Series Statement
- VLSI electronics ;
Other Editions
- VLSI metallization
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