Amorphous silicon carbide thin films
deposition, characterization, etching, and piezoresistive sensors applications
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Author
Publication
2011 - Nova Science Publishers, Hauppauge, N.Y, New York (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-139781613247747
- ISBN-101613247745
- Library of Congress Control Number2011017290
- Better World Books9781613247747
- Better World BooksW8-CEP-297
and 1 more
- Open LibraryOL24885312M
Classifications
- DDC621.3815/2
- LCCTK7871.15.S56 F72 2011
- LCCTK7871.15.S56F72
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