Plasma processing of semiconductors
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Contributions
- Williams, P. F. - Contributor
- North Atlantic Treaty Organization. Scientific Affairs Division. - Contributor
Publication
1997 - Kluwer Academic Publishers, Dordrecht, Netherlands
Language
English
Subjects
Topics
EtchingSemiconductorsPlasma etchingPlasma chemistryPlasma engineeringIndustrial applicationsSemiconductors -- EtchingPlasma etching -- Industrial applicationsPlasma chemistry -- Industrial applications
Series Statement
- NATO ASI series. Series E., Applied sciences ;
- vol. 336
- NATO ASI series.
- no. 336.
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