Surface scattering and diffraction III
4-6 August, 2003, San Diego, California, USA
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Author
Contributions
- Gu, Zu-Han. - Contributor
- Maradudin, A. A. - Contributor
- Society of Photo-optical Instrumentation Engineers. - Contributor
Publication
2003 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
49,500 words, Guess
Page Count
198 pages
Identifiers
- Internet Archiveisbn_0819450626_5189
- ISBN-100819450626
- ISBN-139780819450623
- Library of Congress Control Number2004298704
- OCLC Control Number53333768
and 2 more
- Better World Books9780819450623
- Open LibraryOL3325272M
Classifications
- DDC681/.25
- LCCTA418.7 .S9276 2003
- LCCTA418.7.S9276 2003
Alternate Titles
- Surface scattering and diffraction for advanced metrology
Subjects
Topics
MetrologyCongressesMeasurementSurface roughnessOptical measurementsScattering (physics)Diffractive scatteringMetrology -- CongressesOptical measurements -- CongressesScattering (Physics) -- CongressesDiffractive scattering -- CongressesSurface roughness -- Measurement -- Congresses
Genres
- Congresses
Series Statement
- SPIE proceedings series ;
- v. 5189
- Proceedings of SPIE--the International Society for Optical Engineering ;
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