Analyse der Defektursachen und der Genauigkeit der Strukturübertragung bei der Röntgentiefenlithographie mit Synchrotronstrahlung
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Author
Contributions
- Kernforschungszentrum Karlsruhe. Institut für Kernverfahrenstechnik - Contributor
Publication
1987 - Kernforschungszentrum Karlsruhe, Karlsruhe [Germany], Germany
Language
German
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- OCLC Control Number35486371
- Open LibraryOL57233171M
Alternate Titles
- Causes of defects and accuracy of structure reproduction in deep-etch X-ray lithography using synchrotron radiation.
Subjects
Series Statement
- Kernforschungszentrum Karlsruhe -- 4414
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