Advances in Resist Technology and Processing VIII
Proceedings, 4-5 March 1991 San Jose, California (Spie Proceedings Series, Vol 1466)
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Author
Publication
1991-06-01 - SPIE-International Society for Optical Engine
Language
English
Word Count
169,750 words, Guess
Page Count
679 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL11392712M
- ISBN-139780819405654
- ISBN-100819405655
- OCLC Control Number24150723
- Library of Congress Control Number91061057
and 1 more
- Goodreads3316949
Subjects
Other Editions
- Advances in Resist Technology and Processing VIII
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