Microelectromechanical Systems
Advanced Materials and Fabrication Methods
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Author
- National Research Council Staff
- Engineering and Technical Systems Commission
- Division on Engineering and Physical Sciences Staff
- National Materials Advisory Board
- Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
- Commission on Engineering and Technical Systems
- National Research Council (US)
Publication
2000 - National Academies Press
Language
English
Word Count
19,000 words, Guess
Page Count
76 pages
Physical Format
Paperback
Identifiers
- Internet Archivemicroelectromech00syst
- ISBN-100309059801
- ISBN-139780309059800
- LibraryThing8803100
- OCLC Control Number53011051
and 2 more
- Better World Books9780309059800
- Open LibraryOL10357803M
Classifications
- LCCTK7874
Subjects
Topics
Other Editions
- Microelectromechanical Systems: Advanced Materials and Fabrication Methods
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