Plasma synthesis and etching of electronic materials
symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
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Author
Contributions
- Chang, R. P. H. 1941- - Contributor
- Abeles, B. - Contributor
- Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.) - Contributor
Publication
1985 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
130,500 words, Guess
Page Count
522 pages
Identifiers
- Open LibraryOL3022837M
- ISBN-100931837030
- OCLC Control Number11784552
- Library of Congress Control Number85003085
Classifications
- DDC621.044
- LCCTA2005 .P54 1985
Subjects
Series Statement
- Materials Research Society symposia proceedings ;
Other Editions
- Plasma synthesis and etching of electronic materials: symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
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