Applications of plasma processes to VLSI technology
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Author
Contributions
- Sugano, Takuo, 1931- - Contributor
Publication
1985 - Wiley, New York, New York (State)
Language
English
Word Count
98,500 words, Guess
Page Count
394 pages
Identifiers
- Internet Archiveapplicationsofpl0000unse_w4t7
- ISBN-100471869600
- ISBN-139780471869603
- Goodreads5597297
- Library of Congress Control Number85003255
and 2 more
- Better World Books9780471869603
- Open LibraryOL3023004M
Classifications
- DDC621.381/73
- LCCTK7871.85 .H34713 1985
- LCCTK7871.85.H34713
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