Schmid, Ulrich Prof, Carles Cané, Herbert R.. Shea

Smart sensors, actuators, and MEMS IV

4-6 May 2009, Dresden, Germany

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Author

Contributions

SPIE Europe - Contributor
SPIE (Society) - Contributor
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik - Contributor

Publication

2009 - SPIE, Bellingham, Wash, Washington (State)

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Identifiers

ISBN-100819476366
ISBN-139780819476364
Library of Congress Control Number2010459330
OCLC Control Number436073742
Better World Books9780819476364

and 1 more

Open LibraryOL25255898M

Classifications

LCCTK7875 .S6355 2009
LCCTK7875.S6355 2009
LCCTK7875 .S63 2009

Alternate Titles

Smart sensors, actuators, and MEMS 4
Smart sensors, actuators, and MEMS four

Subjects

Topics

Detectors Actuators Congresses Microtechnology Scanning systems Industrial applications Microelectromechanical systems

Series Statement

Proceedings of SPIE -- v. 7362
Proceedings of SPIE--the International Society for Optical Engineering -- v. 7362.

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