Tribology In Chemical-Mechanical Planarization
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Word Count
50,000 words, Guess
Page Count
200 pages
Physical Format
Hardcover
Identifiers
- ISBN-100824725670
- ISBN-139780824725679
- Goodreads2512096
- Open LibraryOL8125356M
Classifications
- DDC621.9/2
- LCCTJ1075 .L49 2005
First Sentence
In the microelectronics community, the acronym CMP has been interpreted as either chemical-mechanical polishing or chemical-mechanical planarization.
Subjects
Topics
Other Editions
- Tribology In Chemical-Mechanical Planarization
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