High vacuum production in the microelectronics industry
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Author
Contributions
- Alcatel Vacuum Technology (Firm) - Contributor
Publication
1988 - Elsevier, Amsterdam, Netherlands
Language
English
Word Count
55,500 words, Guess
Page Count
222 pages
Identifiers
- ISBN-10044442878X
- ISBN-139780444428783
- Goodreads481038
- Library of Congress Control Number89116745
- Open LibraryOL2243735M
Classifications
- DDC671.7/35
- LCCTS695 .D88 1988
Subjects
Series Statement
- Plasma technology ;
- 2
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