Contributions

  • Institute of Electrial and Electronics Engineers. - Contributor
  • Semiconductor Equipment and Materials International. - Contributor

Publication

1995 - Institute of Electrical and Electronics Engineers, New York, New York (State)

Language

English

Word Count

97,750 words, Guess

Page Count

391 pages

Identifiers

  • ISBN-100780327136
  • ISBN-100780327144
  • ISBN-100780327152
  • ISBN-139780780327139
  • ISBN-139780780327146
and 5 more
  • ISBN-139780780327153
  • Goodreads4333892
  • Library of Congress Control Number97102079
  • OCLC Control Number35324173
  • Open LibraryOL716416M

Classifications

  • LCCIN PROCESS (UTILITY LOAD)

Alternate Titles

  • 1995 Advanced Semiconductor Manufacturing Conference and Workshop
  • Semiconductor manufacturing, economic solutions for the 21st century

Subjects

Other Editions

  • IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and WorkshopInstitute of Electrical and Electronics Engineers1995

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