Contributions

  • Ehrlich, Daniel J. - Contributor
  • Higashi, Gregg S. - Contributor
  • Oprysko, Modest Michael, 1957- - Contributor
  • Materials Research Society. - Contributor

Publication

1988 - Materials Research Society, Pittsburgh, Pa, Pennsylvania

Language

English

Word Count

127,250 words, Guess

Page Count

509 pages

Identifiers

  • Open LibraryOL2529908M
  • ISBN-100931837693
  • OCLC Control Number17677382
  • Library of Congress Control Number88005363
  • Goodreads2322852

Classifications

  • DDC621.381/7
  • LCCTK7874 .L297 1988

Subjects

Series Statement

  • Materials Research Society symposium proceedings,

Other Editions

  • Laser and particle-beam chemical processing for microelectronics: symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.Materials Research Society1988-01-01

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