Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing
symposium held April 27-29, 192, San Francisco, California, U.S.A.
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Contributions
- Nemanich, R.J. - Contributor
Publication
1992 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
132,250 words, Guess
Page Count
529 pages
Identifiers
- Open LibraryOL1723220M
- ISBN-101558991549
- OCLC Control Number26403313
- Library of Congress Control Number92026767
- Goodreads4988960
Classifications
- DDC621.3815/2
- LCCTK7871.85 .C4765 1992
Subjects
Topics
Series Statement
- Materials Research Society symposium proceedings ;
Other Editions
- Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing: symposium held April 27-29, 192, San Francisco, California, U.S.A.
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