Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon
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Author
Publication
1976 - U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., [Washington], District of Columbia
Language
English
Word Count
12,250 words, Guess
Page Count
49 pages
Identifiers
- Open LibraryOL5013006M
- OCLC Control Number2282299
- Library of Congress Control Number76600032
Classifications
- DDC602/.1 s
- LCCQC100 .U57 no. 400-22
Alternate Titles
- Microelectronic test pattern NBS-3 ...
Subjects
Series Statement
- Semiconductor measurement technology
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