Contributions

  • Cale, Timothy S. - Contributor
  • Pintchovski, Fabio S. - Contributor
  • Blewer, R. S. - Contributor
  • University of California, Berkeley. Continuing Education in Engineering. - Contributor

Publication

1993 - Materials Research Society., Pittsburgh, Pa, Pennsylvania

Language

English

Word Count

101,000 words, Guess

Page Count

404 pages

Identifiers

  • Open LibraryOL1467072M
  • ISBN-101558991921
  • Library of Congress Control Number93127476
  • Goodreads4731113

Classifications

  • DDC621.39/5
  • LCCTK7871.15.F5 A38 1993

Subjects

Topics

TungstenMaterialsCongressesMetallic filmsVapor depositionIntegrated circuitsTungsten -- Congresses

Series Statement

  • Materials Research Society conference proceedings,

Other Editions

  • Advanced metallization for ULSI applications, 1992: proceedings of the conference held October 20-22, 1992, in Tempe, ArizonaMaterials Research Society.1993-01-01

Reader Reviews

No reviews yet for this book.

Be the first to share your thoughts!