Optical inspection of microsystems
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Author
Contributions
- Osten, Wolfgang. - Contributor
Publication
2006 - Taylor & Francis, Boca Raton, FL, Florida
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- Internet Archiveopticalimagingse00oste
- ISBN-100849336821
- ISBN-139780849336829
- Goodreads4221464
- Library of Congress Control Number2005046670
and 3 more
- OCLC Control Number259519513
- Better World Books9780849336829
- Open LibraryOL3424155M
Classifications
- DDC670.42/5
- LCCTS156.2 O652 2006
- LCCTS156.2O652 2006
and 1 more
- LCCTS156.2 .O652 2007
Subjects
Topics
MEMSQualitéContrôleAutomatisationInterferometryQuality controlOptical methodsMicroelectronicsOptische AnalyseOptical detectorsMéthodes optiquesMikrosystemtechnikContrôle techniqueDétecteurs optiquesOptical measurementsIndustrial EngineeringEngineering inspectionIndustrial applicationsTECHNOLOGY & ENGINEERINGDispositifs optoélectroniquesMicrosystèmes électromécaniquesQuality control -- Optical methodsOptical detectors -- Industrial applications
Other Editions
- Optical inspection of microsystems
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