Author

Contributions

  • SpringerLink (Online service) - Contributor

Publication

2009 - Springer-Verlag Berlin Heidelberg, Berlin, Heidelberg, Germany

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Physical Format

Electronic resource

Identifiers

  • Internet Archivelowpressureplasm00fran
  • ISBN-139783540858485
  • ISBN-139783540858492
  • ISBN-103540858482
  • ISBN-103540858490
and 5 more
  • Library of Congress Control Number2009921817
  • OCLC Control Number277069476
  • Better World Books9783540858485
  • Better World Books9783540858492
  • Open LibraryOL25554441M

Classifications

  • LCCTA1750-1750.22TK7800
  • LCCTA2020 .F73 2009
  • LCCTA401-492

Subjects

Topics

SputternMaterialsElectronicsEngineeringPlasmaätzenPlasma etchingPECVD-Verfahren

Links

Other Editions

  • Low Pressure Plasmas and Microstructuring TechnologyElectronic resourceSpringer-Verlag Berlin Heidelberg2009-01-01

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