Microelectronics technology and process integration
20-21 October 1994, Austin, Texas
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Author
Contributions
- Chen, Fusen E. - Contributor
- Murarka, S. P. - Contributor
- Society of Photo-optical Instrumentation Engineers. - Contributor
Publication
1994 - SPIE, Bellingham, Wash., USA, Washington (State)
Language
English
Word Count
72,500 words, Guess
Page Count
290 pages
Identifiers
- Internet Archivemicroelectronics2335unse
- ISBN-100819416681
- ISBN-139780819416681
- LibraryThing4308513
- Library of Congress Control Number94067261
and 3 more
- OCLC Control Number31210232
- Better World Books9780819416681
- Open LibraryOL1125383M
Classifications
- LCCTK7874 .M4874 1994
- LCCTK7874.M4874 1994
Subjects
Series Statement
- Proceedings / SPIE--the International Society for Optical Engineering ;
- v. 2335
- Proceedings of SPIE--the International Society for Optical Engineering ;
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