Abformung von Mikrostrukturen auf prozessierten Wafern
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Author
Contributions
- Kernforschungszentrum Karlsruhe. Institut für Mikrostrukturtechnik - Contributor
- Michel, A. - Contributor
- Universität Karlsruhe - Contributor
Publication
1993 - Kernforschungszentrum Karlsruhe, Karlsruhe, Germany
Language
German
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- OCLC Control Number35546304
- Open LibraryOL57232377M
Alternate Titles
- Technique of application of mechanical microstructures onto microelectronic circuits.
Subjects
Series Statement
- KfK (Series) -- 5171
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