In-Situ Patterning: Selective Area Deposition and Etching
Symposium Held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
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Word Count
124,000 words, Guess
Page Count
496 pages
Physical Format
Hardcover
Identifiers
- ISBN-101558990461
- ISBN-139781558990463
- Open LibraryOL8608729M
Subjects
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