Metallization
theory and practice for VLSI and ULSI
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Author
Publication
1993 - Butterworth-Heinemann, Boston, Massachusetts
Language
English
Word Count
62,500 words, Guess
Page Count
250 pages
Identifiers
- Open LibraryOL1729273M
- Internet Archivemetallizationthe0000mura
- ISBN-100750690011
- ISBN-139780750690010
- Goodreads3455199
and 2 more
- LibraryThing3798359
- Library of Congress Control Number92033603
Classifications
- DDC621.39/5
- LCCTK7874 .M868 1993
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