Polykristalline Siliziumkarbidschichten
Hergestellt durch chemische Reaktion von Kohlenwasserstoffen mit Siliziumsubstraten
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Contributions
- Technische Universität München - Contributor
Publication
1974 - , Germany
Language
German
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0 pages
Identifiers
- OCLC Control Number50945086
- Open LibraryOL55315064M
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