Chemistry and lithography
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Author
Contributions
- Society of Photo-optical Instrumentation Engineers - Contributor
Publication
2010 - SPIE Press, Bellingham, Wash, Washington (State)
Language
English
Word Count
215,250 words, Guess
Page Count
861 pages
Identifiers
- ISBN-100819475629
- ISBN-139780819475626
- Library of Congress Control Number2009036266
- OCLC Control Number436945985
- Better World Books9780819475626
and 1 more
- Open LibraryOL24912951M
Classifications
- DDC621.3815/31
- LCCNE2425 .O38 2010
- LCCTP156.E68 O44 2010
and 1 more
- LCCNE2425.O38 2010
Series Statement
- Press monograph -- 192
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