Silicon processing for the VLSI era
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Author
Contributions
- Tauber, Richard N. - Contributor
Publication
1986 - Lattice Press, Sunset Beach, Calif, California
Language
English
Word Count
165,000 words, Guess
Page Count
660 pages
Identifiers
- Open LibraryOL2748505M
- ISBN-100961672137
- OCLC Control Number14258223
- OCLC Control Numbersiliconprocessin02wolf
- Library of Congress Control Number86081923
and 2 more
- Goodreads749235
- LibraryThing1209940
Classifications
- DDC621.381/73
- LCCTK7874 .W635 1986
Subjects
Topics
GravatSiliconEtchingSilicon.SemiconductorsIntegrated circuitsSemiconductors -- Etching.Very large scale integrationCircuits integrats a molt gran escalaIntegrated circuits -- Very large scale integration.
Other Editions
- Silicon processing for the VLSI era
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