Microlithography

science and technology

2nd ed.

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Author

Contributions

Suzuki, Kazuaki. - Contributor
Smith, Bruce W., 1959- - Contributor

Publication

2007 - CRC Press, Boca Raton, Florida

Language

English

Word Count

212,000 words, Guess

Page Count

848 pages

Identifiers

ISBN-100824790243
ISBN-139780824790240
LibraryThing4634081
Goodreads2488044
Library of Congress Control Number2006031516

and 5 more

OCLC Control Number137293053
OCLC Control Number71581976
Better World Books9780824790240
Better World BooksW8-BCJ-238
Open LibraryOL18288544M

Classifications

LCCTK7836 .M525 2007
LCCTK7836.M525 2007
LCCTK7836 .M525 2007eb

Subjects

Series Statement

Optical science and engineering -- 126.
Optical science and engineering (Boca Raton, Fla.) -- 126.

Other Editions

MicrolithographyCRC Press2007

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