Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
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Author
Contributions
- Mattis, Richard L. - Contributor
- National Institute of Standards and Technology (U.S.) - Contributor
Publication
1992 - U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Gaithersburg, MD, Maryland
Language
English
Word Count
35,000 words, Guess
Page Count
140 pages
Physical Format
Microform
Identifiers
- ISBN-100160367883
- ISBN-139780160367885
- OCLC Control Number27018099
- Open LibraryOL17749671M
Classifications
- DDC602/.18 s
- DDC621.3815/2/0287
- LCCQC100 .U57 no. 400-90
and 1 more
- LCCTK7871.99.M44 .U57 no. 400-90
Subjects
Topics
Series Statement
- Semiconductor measurement technology
- NIST special publication -- 400-90.
Other Editions
- Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
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