Rapid Thermal Processing for Future Semiconductor Devices
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Word Count
40,000 words, Guess
Page Count
160 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL10260327M
- ISBN-139780444513397
- ISBN-100444513396
- OCLC Control Numberrapidthermalproc00fuku_237
- Library of Congress Control Number2003271753
Classifications
- LCCTK7871.85 .I57665 2001
Subjects
Topics
PhysicsCongressesTechnologySemiconductorsHeat treatmentAcoustics & SoundScience / PhysicsScience/MathematicsRapid thermal processingTechnology & Industrial ArtsElectronics - SemiconductorsElectronics - Circuits - GeneralSemi-conductors & super-conductorsEngineering - Electrical & ElectronicTechnology : Electronics - Circuits - General
Other Editions
- Rapid Thermal Processing for Future Semiconductor Devices
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