Contributions

  • Semiconductor Equipment and Materials Institute. - Contributor
  • IEEE Components, Hybrids, and Manufacturing Technology Society. - Contributor
  • IEEE Electron Devices Society. - Contributor

Publication

1993 - Institute of Electrical and Electronics Engineers, New York, N.Y, New York (State)

Language

English

Word Count

38,000 words, Guess

Page Count

152 pages

Identifiers

  • ISBN-100780312120
  • ISBN-100780312139
  • ISBN-100780312147
  • ISBN-139780780312128
  • ISBN-139780780312135
and 2 more

Classifications

  • LCCTK7871.85 .I217 1992

Alternate Titles

  • ISMSS.
  • 1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
  • 1993 Proceedings, International Semiconductor Manufacturing Science Symposium (ISMSS)

Subjects

Other Editions

  • IEEE/SEMI International Semiconductor Manufacturing Science Symposium: July 19-20, 1993, San Francisco, CA USA.Institute of Electrical and Electronics Engineers1993-01-01

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