Contributions

  • Michalske, Terry A. - Contributor
  • Wendman, Mark A. - Contributor
  • Society of Photo-optical Instrumentation Engineers. - Contributor
  • United States. Defense Advanced Research Projects Agency. - Contributor

Publication

1997 - SPIE, Bellingham, Wash., USA, Washington (State)

Language

English

Word Count

38,000 words, Guess

Page Count

152 pages

Identifiers

Classifications

  • LCCTJ1191.5 .M536 1997

Subjects

Topics

CongressesMicromechanicsMicromachiningMicroelectronicsMicrowave imagingScanning probe microscopyMicromachining -- Congresses.

Genres

  • Congresses.

Series Statement

  • SPIE proceedings series ;

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