Technology of Integrated Circuits
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Author
Contributions
- Mader, Hermann - Contributor
- Friedrich, Hans - Contributor
- Heywang, Walter - Contributor
- Müller, Rudolf - Contributor
Publication
2000 - Springer Berlin Heidelberg, Berlin, Heidelberg, Germany
Language
English
Word Count
85,000 words, Guess
Page Count
340 pages
Physical Format
Electronic resource
Identifiers
- Open LibraryOL27091199M
- ISBN-139783642085475
- ISBN-103642085474
- OCLC Control Number851368126
Classifications
- DDC621.381
- LCCTK7800-8360
- LCCTK7874-7874.9
Description
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
Subjects
Series Statement
- Springer Series in ADVANCED MICROELECTRONICS -- 2
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