Handbook of VLSI microlithography
principles, technology, and applications
2nd ed.
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Author
Contributions
- Helbert, John N. - Contributor
Publication
2000 - Noyes Publications/William Andrew Pub., Norwich, NY, New York (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- Internet Archivehandbookvlsimicr00helb_411
- ISBN-100815514441
- ISBN-139780815514442
- Library of Congress Control Number00028173
- OCLC Control Number49708527
and 2 more
- Better World Books9780815514442
- Open LibraryOL6781112M
Classifications
- DDC621.3815/31
- LCCTK7874 .H3494 2001
- LCCTK7874.H3494 2001
and 1 more
- LCCTK7874 .H3494 2001eb
Subjects
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