Doping engineering for device fabrication
symposium held April 18-19, 2006, San Francisco, California, U.S.A.
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Author
Contributions
- Pawlak, B. J. - Contributor
- Materials Research Society. Meeting - Contributor
- Symposium on Sub-Second Rapid Thermal Processing for Device Fabrication (2006 : Francisco, Calif.) - Contributor
Publication
2006 - Materials Research Society, Warrendale, Pa, Pennsylvania
Language
English
Word Count
53,250 words, Guess
Page Count
213 pages
Identifiers
- Open LibraryOL18028360M
- ISBN-139781558998681
- OCLC Control Number74322933
- Library of Congress Control Number2007281823
Classifications
- DDC621.3815/2
- LCCTK7871.85 .D66 2006
Alternate Titles
- Sub-second rapid thermal processing for device fabrication
Subjects
Genres
- Congresses.
Series Statement
- Materials Research Society symposium proceedings -- v. 912
Other Editions
- Doping engineering for device fabrication: symposium held April 18-19, 2006, San Francisco, California, U.S.A.
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