G. S. Oehrlein

Identifiers

Open LibraryOL8238196A

Top Subjects

Lithography (1)
Congresses (1)
Plasma etching (1)
Semiconductors (1)
Integrated circuits (1)
Thin films (1)

Books by G. S. Oehrlein

Total count: 2

Advanced etch technology for nanopatterning13-14 February 2012, San Jose, California, United States

SPIE2012-01-01
Materials, Technology and Reliability for Advanced Interconnects and Low-K DielectricsVolume 612

University of Cambridge ESOL Examinations2014-01-01