Advanced etch technology for nanopatterning
13-14 February 2012, San Jose, California, United States
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Contributions
- SPIE (Society) - Contributor
Publication
2012 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-100819489840
- ISBN-139780819489845
- Library of Congress Control Number2012471867
- OCLC Control Number797974369
- Open LibraryOL30733352M
Classifications
- LCCTA2020 .A615 2012
- LCCQC371 .S67 v. 8328
Alternate Titles
- Advanced Etch Technology for Nanopatterning Conference (AETNC)
- AETNC
Subjects
Series Statement
- Proceedings of SPIE -- v. 8328
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 8328.
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