Microfabrication

Introduction to Microfabrication

Sami Franssila

Vlsi Electronics: Microstructure Science

Norman G. Einspruch

The MEMS handbook

edited by Mohamed Gad-el-Hak.

Laser microfabrication: thin film processes and lithography

edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.

Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII: 22-24 January 2007, San Jose, California, USA

Jung-Chih Chiao, Mary Maher, Thomas Ann Suleski, Harold Stewart, Eric Johnson undifferentiated

Makers: the new industrial revolution

Chris Anderson

Inkjet technology for digital fabrication

edited by Ian M Hutchings, Graham Martin

Materials Development for Direct Write Technologies: Symposium Held April 24-26, 2000, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 624.)

Douglas B. Chrisey

Third International Symposium on Laser Precision Microfabrication: proceedings : 27-31 May, 2002, Osaka, Japan

Isamu Miyamoto ... [et al.] chairs/editors ; organized by JLPS--Japan Laser Processing Society ... [et al.] ; sponsored by the Commemorative Association for the Japan World Exposition (1970) ... [et al.] ; cooperating organizations, LIA--Laser Institute of America ... [et al.].

Transport in laser microfabrication: fundamentals and applications

Costas P. Grigoropoulos.