Laser microfabrication
thin film processes and lithography
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Author
Contributions
- Ehrlich, Daniel J. - Contributor
- Tsao, Jeffrey Y. - Contributor
Publication
1989 - Academic Press, Boston, Massachusetts
Language
English
Word Count
146,750 words, Guess
Page Count
587 pages
Identifiers
- ISBN-100122334302
- ISBN-139780122334306
- Goodreads4846667
- Library of Congress Control Number88024215
- Better World Books9780122334306
and 2 more
- Better World BooksW8-ADL-005
- Open LibraryOL2047026M
Classifications
- DDC621.36/6
- LCCTA1677 .L366 1989
- LCCTA1677.L366 1989
Subjects
Other Editions
- Laser microfabrication: thin film processes and lithography
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