Vacuum technology, thin films, and sputtering
an introduction
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Word Count
37,750 words, Guess
Page Count
151 pages
Identifiers
- Open LibraryOL3493834M
- ISBN-100126747806
- OCLC Control Number8667288
- OCLC Control Number12042044
- Library of Congress Control Number82013748
Classifications
- DDC621.5/5
- LCCTP156.V3 S78 1983
Subjects
Other Editions
- Vacuum technology, thin films, and sputtering: an introduction
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