Handbook of sputter deposition technology
principles, technology, and applications
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Author
Contributions
- Hayakawa, Shigeru, 1925- - Contributor
Publication
1992 - Noyes Publications, Park Ridge, N.J., U.S.A, New Jersey
Language
English
Word Count
76,000 words, Guess
Page Count
304 pages
Identifiers
- Open LibraryOL1869359M
- ISBN-100815512805
- OCLC Control Number22953508
- Library of Congress Control Number90027820
- Goodreads1630025
Classifications
- DDC621.3815/2
- LCCTS695 .W37 1992
- LCCTS695.W37 1992
Subjects
Series Statement
- Materials science and process technology series
Links
Other Editions
- Handbook of sputter deposition technology: principles, technology, and applications
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