Science and technology of microfabrication
symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.
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Author
Contributions
- Howard, R. E. 1948- - Contributor
- Materials Research Society. Meeting - Contributor
- Symposium on the Science and Technology of Microfabrication (1986 : Boston, Mass.) - Contributor
Publication
1987 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
93,250 words, Guess
Page Count
373 pages
Identifiers
- Open LibraryOL2379245M
- ISBN-100931837421
- OCLC Control Number15488001
- OCLC Control Numbersciencetechnolog0076unse
- Library of Congress Control Number87007749
Classifications
- DDC621.381/73
- LCCTK7874 .S33 1987
Subjects
Topics
Series Statement
- Materials Research Society symposia proceedings,
Other Editions
- Science and technology of microfabrication: symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.
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